Physicists have turned a long-standing imaging workhorse into a kind of nanoscale chisel, using a razor-precise ion beam to ...

(Nanowerk News) A research team in Japan has now succeeded in developing high precision X-ray deformable mirrors that can be configured as necessary. They are the first to have achieved the formation ...

Electron-beam inspection is proving to be indispensable for finding critical defects at sub-5nm dimensions. The challenge now is how to speed up the process to make it economically palatable to fabs.